S.P, C.; C.S, W. Coating of Titanium Nitride Thin Film on Stainless Steel Using an RF Planar Coil Inductively Coupled Plasma. Malaysian Journal of Science, [S. l.], v. 21, n. 1&2, p. 107–113, 2002. Disponível em: https://samudera.um.edu.my/index.php/MJS/article/view/8596. Acesso em: 20 nov. 2024.